A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic

Author

 J. S. Kong, M. Raulli, K. Maute, R.A. Saravanan, L.-A. Liew, D.M. Franpgopol, and R. Raj

Journal

Sensors and Actuators

Publication Date

October 2004

Link

https://doi.org/10.1016/j.sna.2004.05.001 51회 연결