A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic

Author

 J. S. Kong, M. Raulli, K. Maute, R.A. Saravanan, L.-A. Liew, D.M. Franpgopol, and R. Raj

Journal

Sensors and Actuators

Publication Date

October 2004

File

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